Title of article :
Gas sensing properties of thin- and thick-film tin-oxide materials
Author/Authors :
Becker، نويسنده , , Th and Ahlers، نويسنده , , St and Bosch-v.Braunmühl، نويسنده , , Chr and Müller، نويسنده , , G and Kiesewetter، نويسنده , , O، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Abstract :
Comparative gas detection measurements have been performed on thin-film (d∼50–300 nm) and thick-film (d∼15–80 μm) SnO2 devices. We find that at normal sensor operation temperatures of the order of 400°C thin-film devices mainly respond to oxidising gases such as O3 and NO2, whereas thick-film ones preferably respond to reducing species like CO and CH4. A significant response towards oxidising species, however, was observed upon reducing the operation temperature of the thick-film devices to about 100°C. We explain these effects in terms of a simple diffusion-reaction model taking into account the different architectures of thin- and thick-film gas sensing devices.
Keywords :
Tin-oxide , Thick-films , thin-films , Diffusion-reaction model , Sensitivity model
Journal title :
Sensors and Actuators B: Chemical
Journal title :
Sensors and Actuators B: Chemical