Title of article :
Thin film sensors of SnO2-CuO-SnO2 sandwich structure to H2S
Author/Authors :
Yuanda، نويسنده , , Wu and Maosong، نويسنده , , Tong and Xiuli، نويسنده , , He and Yushu، نويسنده , , Zhang and Guorui، نويسنده , , Dai، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Abstract :
SnO2 thin films were prepared using SnCl4 and O2 as precursors by means of plasma enhanced chemical vapour deposition (PECVD) method, and were modified with CuO by soaked technique to form a SnO2-CuO-SnO2 sandwich structure. The sensing composite thin film sensors were proved to be highly sensitive and selective to H2S. Furthermore, the response and recovery speed of the thin film sensors was fairly quick.
Keywords :
Sandwich structure , Plasma enhanced chemical vapour deposition , Gas sensors
Journal title :
Sensors and Actuators B: Chemical
Journal title :
Sensors and Actuators B: Chemical
