Title of article
Thin film sensors of SnO2-CuO-SnO2 sandwich structure to H2S
Author/Authors
Yuanda، نويسنده , , Wu and Maosong، نويسنده , , Tong and Xiuli، نويسنده , , He and Yushu، نويسنده , , Zhang and Guorui، نويسنده , , Dai، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
5
From page
187
To page
191
Abstract
SnO2 thin films were prepared using SnCl4 and O2 as precursors by means of plasma enhanced chemical vapour deposition (PECVD) method, and were modified with CuO by soaked technique to form a SnO2-CuO-SnO2 sandwich structure. The sensing composite thin film sensors were proved to be highly sensitive and selective to H2S. Furthermore, the response and recovery speed of the thin film sensors was fairly quick.
Keywords
Sandwich structure , Plasma enhanced chemical vapour deposition , Gas sensors
Journal title
Sensors and Actuators B: Chemical
Serial Year
2001
Journal title
Sensors and Actuators B: Chemical
Record number
1416762
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