Miniaturized flame ionization detector for gas chromatography

The Technical University Hamburg-Harburg and ABB Corporate Research are currently exploring the potential to apply silicon–glass microsystems as technology platform for creating a miniaturized flame ionization detector (FID). This device can be used for the detection of hydrocarbons in gas chromatography. Design and first characterizations of such micro-FIDs have been published elsewhere in Ref. [1] [Sens. Actuators 63B (3) (2000)]. For a deeper understanding of the performance and further optimization potential, the detectors have now been investigated more detailed. The results of those tests show a detection limit of 104 ppb pentane and 441 ppb methane.