Hydrogen sensitivity of SnO2 thin films doped with Pt by laser ablation

Thin polycrystalline SnO2 films were obtained by magnetron sputtering with subsequent oxidation and then doped with platinum by laser ablation method. It was observed that surface doping with platinum improves significantly the materialʹs sensitivity to hydrogen. Sensor properties of SnO2(Pt) films were investigated in a temperature range 100–350 °C in hydrogen–air mixtures containing 20–2000 ppm of H2. Optimal doping parameters (thickness of platinum films and energy density of laser radiation) were determined.