Author/Authors :
E. Barborini، نويسنده , , E. and Bongiorno، نويسنده , , G. and Forleo، نويسنده , , A. and Francioso، نويسنده , , Jorge L. Sônego Milani، نويسنده , , P. and Kholmanov، نويسنده , , I.N. and Piseri، نويسنده , , P. and Siciliano، نويسنده , , P. and Taurino، نويسنده , , A.M. and Vinati، نويسنده , , S.، نويسنده ,
Abstract :
Supersonic cluster beam deposition (SCBD) is used for fabrication of microsensors based on nanostructured titania layers. With a simple one-step post-deposition thermal treatment it is possible to modify the structural and electrical properties of the sensitive layers. Morphological, structural, and electrical characterisations are shown. The obtained sensors have very good performances in term of dynamic response to the exposure to methanol.
