Author/Authors :
Miglio، نويسنده , , S. and Bruzzi، نويسنده , , M. and Scaringella، نويسنده , , M. and Menichelli، نويسنده , , D. and Leandri، نويسنده , , E. and Baldi، نويسنده , , A. and Bongiorno، نويسنده , , G. and Piseri، نويسنده , , P. and Milani، نويسنده , , P.، نويسنده ,
Abstract :
Humidity sensors based on cluster assembled nanostructured carbon films in capacitive configuration have been fabricated and characterized. An electronic read-out system has been designed and implemented in order to measure the complex impedance of the device under operation. The sensor and read-out electronics provide a fully integrated and cost-effective system. Devices under test show a fast dynamic response and a good sensitivity compared to capacitive commercial systems. A linear response is observed for relative humidity in the range up to 70%. Hysteresis is practically absent in this range, while for higher values it is at most in the order of 2%.
