3D FE simulation of H2 SAW gas sensor

In this work, a three-dimensional finite element (3D FE) model of a two-port surface acoustic wave (SAW) delay line based hydrogen sensor on XY lithium niobate (LiNbO3) substrate with a palladium thin film is developed and simulated. This simulation is performed using ANSYS Version 6.1 platform. Changes in the propagation characteristics of the SAW in terms of the time delay in the voltage and particle displacements due to exposure of palladium thin film to hydrogen and insertion loss of the device are studied. Also, the impulse response of the device is simulated, from which the frequency response and hence the center frequency and insertion loss of the sensor is determined. The 3D representation of the surface acoustic wave propagation on the substrate is demonstrated.