Title of article
High sensitivity anhydride hexafluorhydric acid sensor
Author/Authors
V. Blondeau-Patissier، نويسنده , , V. and Ballandras، نويسنده , , S. and Lengaigne، نويسنده , , G. and Daniau، نويسنده , , W. and Martin، نويسنده , , G. and Blind، نويسنده , , P. and Hauden، نويسنده , , D. and Nadal، نويسنده , , M.H.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
6
From page
219
To page
224
Abstract
This work demonstrates the relevance of a Love-wave device dedicated to the detection of low concentrations of anhydride hexafluorhydric (HF) (CHF < 3 ppm). Improvements are demonstrated compared to previous versions of the detection system for which surface transverse wave (STW) devices were used. We also have tested a coating, specifically sensitive to HF, deposited atop a STW resonator, operating along the same Love-wave principle and exhibiting improved sensitivity compared to STW sensors. Time-life and sensitivity of each device are reported and discussed. Finally, a surface analysis has been performed to try and explain the actual effect of HF on the sensor surface.
Keywords
Toxic gas sensor , Love-wave , Anhydride hexafluorhydric (HF)
Journal title
Sensors and Actuators B: Chemical
Serial Year
2005
Journal title
Sensors and Actuators B: Chemical
Record number
1420823
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