Three-dimensional optofluidic waveguides in hydrophobic silica aerogels via supercritical fluid processing

Optofluidic components enable flexible routing and transformations of light beams in integrated lab-on-a-chip systems with the use of carefully shaped fluid parcels. For structural integrity reasons, the working fluid is typically contained within a solid-material chip. One of the outstanding challenges in optofluidics is the preparation and processing of optofluidic waveguides. These require solid cladding materials that are sufficiently strong to contain the fluid while possessing optical properties that allow efficient confinement of light within fluidic channels. Here, we report on a new technique to obtain liquid-core optofluidic waveguides based on total internal reflection of light in three-dimensional water-filled channels embedded in hydrophobic silica aerogel. To form the channels, we employ a fiber made of cage-like silicon-oxygen compound – trifluoropropyl polyhedral oligomeric silsesquioxane (trifluoropropyl POSS) – which has high solubility in supercritical CO2 (scCO2). A U-shaped fiber made of trifluoropropyl POSS is obtained by melt/freeze processing of POSS powder and subsequently placed in a silicate sol. After gelation of the sol and aging of the gel, scCO2 extraction is used to dry the wet gel and extract the POSS fiber, yielding a dry silica aerogel with a U-shaped empty channel inside it. Finally, the silanol groups at the surface of the aerogel are reacted with hexamethyldisilazane (HMDS) in the presence of scCO2 to render the aerogel surface hydrophobic and the channel is filled with water. We demonstrate efficient waveguiding by coupling light into the water-filled channel and monitoring the channel output. The presented procedure opens up new possibilities for creating complex three-dimensional networks of liquid channels in aerogels for optofluidic applications.