Nanoindentation and nanowear of extremely thin protective layers of C–N and B–C–N

Carbon nitride (C–N) and boron and carbon nitride (B–C–N) films, 1 and 3 nm thick, were deposited on magnetic disks by means of a complex treatment method involving plasma irradiation and CN or BCN reactive sputtering in nitrogen and helium mixed gas using two targets of h-BN and graphite. The properties of these extremely thin coatings were evaluated by indentation using an atomic force microscope and nanowear tests using a lateral modulation friction force microscope. The extremely thin B–C–N coatings show highest indentation hardness and good wear resistance properties. It is proposed that this is due to their graduated composition and interfacial properties.