Author/Authors :
Sharma، نويسنده , , Neha and Kumar، نويسنده , , N. and Sundaravel، نويسنده , , B. S. Panda، نويسنده , , Kalpataru and David، نويسنده , , Wang and Kamarrudin، نويسنده , , Karim M. El-Dash ، نويسنده , , S. and Panigrahi، نويسنده , , B.K. and Tyagi، نويسنده , , A.K. and Lin، نويسنده , , I-Nan and Raj، نويسنده , , Baldev، نويسنده ,
Abstract :
Nano-crystalline diamond coatings were deposited on the silicon substrate using Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD). Experiments were performed by varying the H2 content in CH4/H2 plasma during synthesis. Raman spectral analysis revealed that with decrease in hydrogen content in the CH4 plasma, the ID/IG ratio decreases with the formation of smaller crystallites. Such a film possesses a large grain boundary fraction containing hydrogenated amorphous carbon (a-C:H). During tribological test, sufficient amount of hydrogen present in the grain boundary passivates the dangling σ-bond causing ultra-low friction and extremely low wear evident by improvement in microstructure.
