Flexural-hinge guided motion nanopositioner stage for precision machining: finite element simulations

Finite element analysis has been used to study the behavior of flexural-hinge guided- motion nanopositioning stages designed for use in precision machining. The primary criteria of such nanopositioners are a high stiffness and large load carrying ability. Both static loading and modal frequency analysis are performed. A procedure is developed by which we can redesign and reanalyze the model while simulating the performance of the nanopositioner. Modification of dimensions enables us to control and optimize resonant frequency, displacement, stresses, and force to be applied to the hinges to achieve the desired response of the positioner and the positioner motion.