Creating a low-cost, ultra-clean environment

This paper describes a way to create a cleanroom environment with a limited budget, which may be useful to organizations requiring small amounts of very high quality surface processing. After a brief review of some general principles, it discusses the design, including practical constraints, and installation of a small facility in the University of Warwick. Based around standard bought-in items, it achieves cleanroom Class 10 000 (ISO Class 7) with local enclosures of better than Class 10 (ISO Class 4) air quality.