Title of article
Intercomparison of scanning probe microscopes
Author/Authors
Breil، نويسنده , , R and Fries، نويسنده , , Garnaes، J. نويسنده , , J and Haycocks، نويسنده , , J and Hüser، نويسنده , , D and Joergensen، نويسنده , , J and Kautek، نويسنده , , W and Koenders، نويسنده , , L and Kofod، نويسنده , , N and Koops، نويسنده , , K.R and Korntner، نويسنده , , R and Lindner، نويسنده , , B and Mirandé، نويسنده , , W and Neubauer، نويسنده , , A and Peltonen، نويسنده , , J and Picotto، نويسنده , , G.B and Pisani، نويسنده , , M and ، نويسنده ,
Issue Information
فصلنامه با شماره پیاپی سال 2002
Pages
10
From page
296
To page
305
Abstract
Comparison measurements on reference standards are reported in which 13 partners with different instruments took part. A set of prototype standards which had been produced and calibrated within a European project were used for the measurements. Here, results of measurements on a 240 nm step height standard and a two-dimensional lateral standard with a nominal pitch of 1 μm are reported.
Keywords
Scanning probe microscopy , Quantitative microscopy , Comparison measurements , Calibration artifacts , Calibration
Journal title
Precision Engineering
Serial Year
2002
Journal title
Precision Engineering
Record number
1428761
Link To Document