Electrorheological fluid-assisted ultra-precision polishing for small three-dimensional parts

This paper deals with a new machining method (electrorheological fluid-assisted polishing) for small three-dimensional parts such as micro-aspherical lens, die and mirror. The behavior of electrorheological particles and abrasive particles in the vicinity of the tip of the tool was observed by CCD microscope, and the electric field strength, electrode shape, and type of abrasive particles were investigated. It was clear that the electrorheological effect facilitates collection of the abrasive particles at the tool tip, even while the tool is rotating. Then, electrorheological fluid-assisted micro-aspherical generator system was developed, which is capable of micro-grinding and micro-polishing on the same machine. The system demonstrated the excellent polishing performance of small area after grinding process.