A novel precision positioning table utilizing impact force of spring-mounted piezoelectric actuator—part II: theoretical analysis

A simple mechanical vibration model was formulated to analyze the dynamic characteristics of the precision positioning table utilizing a spring-mounted piezoelectric actuator. The formulated model was validated by comparing the results of numerical simulations with the experimental data of Part I. The performance of the precision positioning table was predicted by changing the parameters of mass ratio and stiffness of spring. It is found that the analytic method described in this paper can provide an effective means in designing the precision positioning table utilizing a spring-mounted piezoelectric actuator.