Precision grinding of components for aerostatic micro guidance

The work described in this paper deals with a micro grinding process development for components of a guiding system with active micro actors. Starting with the selection of a machine tool concept, investigations with different tool specifications as well as process kinematics and parameters are performed. Thereby the process is characterised by resulting shape accuracy and surface quality of the workpiece. By using an ultra precision machine tool and fine grained grinding wheels a shape accuracy within the submicron range and high surface qualities can be achieved.