Title of article :
Validation of a single fibre-fed heterodyne laser interferometer with nanometre uncertainty
Author/Authors :
Knarren، نويسنده , , B.A.W.H. and Cosijns، نويسنده , , S.J.A.G. and Haitjema، نويسنده , , H. and Schellekens، نويسنده , , P.H.J.، نويسنده ,
Issue Information :
فصلنامه با شماره پیاپی سال 2005
Pages :
8
From page :
229
To page :
236
Abstract :
In this paper the validation of a fiber-fed heterodyne laser interferometer with nanometre uncertainty is presented. The achievable displacement measurement uncertainty is investigated for different polarisation maintaining fibres used in these interferometers. Measurement results are shown for both a range of 1 μ m as well as a range of 300 mm. It is shown that a (selected) PM-fibre with an extinction ratio of 1:1650 and the use of an external reference allows realising a fibre-fed laser interferometer able to measure displacements with the same uncertainty as a laser interferometer system without fibre. Tests were performed with fibres ranging in length up to 50 m.
Keywords :
Laser interferometry , Heterodyne laser interferometry , Dimensional metrology , optical fibres , Nanometre uncertainty
Journal title :
Precision Engineering
Serial Year :
2005
Journal title :
Precision Engineering
Record number :
1429031
Link To Document :
بازگشت