Scaling down of microequipment parameters

A method of micromechanical device fabrication is examined in this article. The method consists of the development of equipment which has sizes comparable with the sizes of the produced parts. There are different approaches to this problem. We propose a method of micromachine tool and micromanipulator creation. We do not use the expensive elements. To obtain the necessary precision we utilize the natural advantages of equipment of small size. In this article the error analysis of the microequipment is given and the methods of error minimization are described. An example of the developed microequipment prototypes is given.