• Title of article

    Surface metrology algorithm testing system

  • Author/Authors

    Bui، نويسنده , , Son H. and Vorburger، نويسنده , , Theodore V.، نويسنده ,

  • Issue Information
    فصلنامه با شماره پیاپی سال 2007
  • Pages
    8
  • From page
    218
  • To page
    225
  • Abstract
    This paper presents the development of a Web-based surface metrology algorithm testing system. The system includes surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a Website at the National Institute of Standards and Technology (NIST), USA. Manufacturers, instrument makers, and researchers have access via the Internet to standard data sets and analysis tools located on a NIST server. The system serves to validate the accuracy of algorithms as well as the calculation of surface parameters in industry. The System can be accessed through http://syseng.nist.gov/VSC/jsp.
  • Keywords
    DATABASE , INTERNET , surface , textures , Roughness , Parameters , filtering , topography , Software , Website
  • Journal title
    Precision Engineering
  • Serial Year
    2007
  • Journal title
    Precision Engineering
  • Record number

    1429233