Measurement and calibration for Stewart micromanipulation system

In this article, hysteresis controller design and static error compensation method for a 6-dof micro-positioning platform driven by piezoelectric actuator is studied. The nonlinear hysteresis effect of the piezoelectric actuator is analyzed by means of Preisach model. Its inverse model is used as the feedforward controller. Error compensation method is designed to compensate manufacture error and assembly error by use of the developed 3-points-3-axes measurement method. From practical experiment, the proposed method makes improvement on the accuracy of positioning.