Parallel kinematics for nanoscale Cartesian motions

A novel design of high load capacity multiaxis positioning stages with an accuracy in the range of nanometers is presented. For strokes of some 10 mm with no play and high stiffness a general design principle supporting six Cartesian degrees of freedom has been developed using a new parallel kinematic topology based on trapezoidal arrangements. It was developed together with novel flexures and drives for synchrotron optics in ultrahigh vacuum at BESSY. The performance of the setup and its kinematic properties are described as well as high-resolution measurements of the six motions and their crosstalk. Applications of the design have been in daily operation since 1998. Since then, more than 30 derivates have been implemented with outstanding characteristics and excellent reliability.