Electrical discharge machining of submicron holes using ultrasmall-diameter electrodes

We have carried out the electrical discharge machining (EDM) of submicron holes using ultrasmall-diameter electrodes. Two types of electrode were used: tungsten electrodes fabricated by the combination of wire electrodischarge grinding and electrochemical machining, and silicon electrodes originally designed as probes for scanning probe microscopes. The diameters of the former and latter were 1 μm or less, and less than 0.15 μm, respectively. Holes were drilled using a relaxation-type pulse generator at an open-circuit voltage of less than or equal to 20 V with the machineʹs stray capacitance as the only capacitance. Using tungsten electrodes, holes of less than 1 μm in diameter and more than 1 μm in depth were successfully drilled. A 1.3-μm-wide slot was also fabricated by drilling many holes with a small pitch. It was possible to drill holes of approximately 0.5 μm diameter using silicon electrodes because the electrode diameter was less than those of the tungsten electrodes. These holes have the smallest reported diameter for holes drilled by EDM, indicating the possibility of submicron- and nanoscale machining by EDM.