Speed control of an electromechanical integrated electrostatic harmonic actuator

In this paper, based on the electromechanical coupled dynamic equations of the actuator, the speed transfer function of the control system is presented. In order to improve the speed of the control system, a speed feedback control model is presented and a PID control algorithm is used. Using the model, the effects of the mechanical and electrical parameters on the feedback control system are investigated. Based on these results, parameters for the feedback control system are determined so that a rapid response of the control system is achieved. Besides this, the fluctuation of the load torque is considered, and the response of the control system to the torque fluctuation is eliminated by means of the compensated voltage. The simulations of the feedback speed control system based on software tool Simulink are done. The simulations show the validity of the analysis results.