Diamond tool wear measurement by electron-beam-induced deposition

Quantitative characterization of a diamond tool profile is critical to reveal tool wear mechanisms. An electron-beam-induced deposition (EBID) method reported previously is further developed and improved to measure diamond tool profiles using a field emission scanning electron microscope (SEM). The edge radius and wear land length for new and worn diamond tools were derived from analysis of the EBID-SEM images. Experimental results are presented to show that the methodology is an effective means to characterize diamond tool wear.