Title of article
Monolithically integrated MEMS mirror array with low electrical interference in wavelength-selective switches
Author/Authors
Sakata، نويسنده , , Tomomi and Sassa، نويسنده , , Fumihiro and Usui، نويسنده , , Mitsuo and Kodate، نويسنده , , Junichi and Ishii، نويسنده , , Hiromu and Machida، نويسنده , , Katsuyuki and Jin، نويسنده , , Yoshito، نويسنده ,
Issue Information
فصلنامه با شماره پیاپی سال 2013
Pages
5
From page
897
To page
901
Abstract
This paper describes the fabrication of a microelectromechanical-system (MEMS) mirror array for a wavelength-selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, consists of a MEMS mirrors and a mirror-drive electrodes. In order to reduce electrical interference, comb-shaped ground walls with a high aspect ratio of about 20 are monolithically integrated with the MEMS mirror chip. Further, U-shaped gold electroplating walls are formed in the mirror-drive electrode chip. With these walls, each MEMS mirror successfully operates with low electrical interference.
Keywords
Electrical interference , WSS , MEMS , Monolithic
Journal title
Precision Engineering
Serial Year
2013
Journal title
Precision Engineering
Record number
1429905
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