Author/Authors :
Sakata، نويسنده , , Tomomi and Sassa، نويسنده , , Fumihiro and Usui، نويسنده , , Mitsuo and Kodate، نويسنده , , Junichi and Ishii، نويسنده , , Hiromu and Machida، نويسنده , , Katsuyuki and Jin، نويسنده , , Yoshito، نويسنده ,
Abstract :
This paper describes the fabrication of a microelectromechanical-system (MEMS) mirror array for a wavelength-selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, consists of a MEMS mirrors and a mirror-drive electrodes. In order to reduce electrical interference, comb-shaped ground walls with a high aspect ratio of about 20 are monolithically integrated with the MEMS mirror chip. Further, U-shaped gold electroplating walls are formed in the mirror-drive electrode chip. With these walls, each MEMS mirror successfully operates with low electrical interference.
Keywords :
Electrical interference , WSS , MEMS , Monolithic
