Characterization of instrument drift using a spherical artifact

Drift is a common and inevitable error source in measurements. Currently there are two main approaches to address instrument drift in image or area-based measurements, drift calibration with target tracking and active feedback correction. We propose an alternative approach to drift calibration for profilometers, particularly high speed instruments such as confocal microscopes or scanning white light interferometers. The method is based on sequential measurements of a spherical artifact whose diameter is larger than the field of view. A best fit sphere algorithm is used to determine the movement of the spherical artifactʹs center over time. This reduces drift measurement uncertainty because it uses height data over the full field of view, compared to target tracking strategies that involve tracking small features. Simulation results show that under practical conditions, e.g. with typical noise levels and typical drift rates, this method is quite effective and can yield measurements with low uncertainty. The measurement is demonstrated on a commercial confocal microscope to determine drift rate magnitude and direction.