Fabrication of gas sensing devices with ZnO nanostructure by the low-temperature oxidation of zinc particles

A method for low-temperature synthesis of a mixture of high-density ZnO nanoflakes and nanowires was developed to produce low-cost and high-efficiency gas sensors with ZnO nanostructures. ZnO nanoflakes and nanowires were grown on glass substrates by the RF sputter deposition of Zn particles and localized oxidation at a low temperature of 300 °C. The synthesized ZnO nanoflakes and nanowires were polycrystalline and had nanometer dimensions, as revealed by X-ray diffraction (XRD) and field emission scanning electron microscope (FESEM) measuring. A gas sensor based on the mixture of ZnO nanoflakes/nanowires responded rapidly and sensitively to ethanol. The sensing properties of the ZnO nanostructure sensor were approximately 72% for 50 ppm ethanol gas at an operating temperature of 100 °C. The response to 10 ppm of ethanol gas was 42% at the same temperature.