Title of article :
Sub-ppm gas sensor detection via spiral μ-preconcentrator
Author/Authors :
Gràcia، نويسنده , , I. and Ivanov، نويسنده , , P. and Blanco، نويسنده , , F. and Sabaté، نويسنده , , N. and Vilanova، نويسنده , , X. and Correig، نويسنده , , X. and Fonseca، نويسنده , , L. and Figueras، نويسنده , , E. and Santander، نويسنده , , J. N. Cane، نويسنده , , C.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2008
Pages :
6
From page :
149
To page :
154
Abstract :
In the present work, a silicon-based preconcentrator is proposed and developed, which consists of a spiral-shaped micro-preconcentrator followed by a μ-hotplate sensor matrix. The shape of the preconcentrator was chosen according to technological and gas-flow limitations as it is required that the whole gas flow passes through the adsorbent in order to obtain a good concentration factor. Therefore, a spiral-shaped configuration was adopted with a 10-cm length, and a width/depth of 300 μm. In this case, the carrier flow is high enough to avoid stagnation but provide a fast evacuation of the gas after applying a thermal desorption pulse. The proposed spiral μ-preconcentrator leads to a robust and highly integrated device able to be incorporated in a GC/MS-gas sensor system.
Keywords :
Micro-hotplate gas sensors , Adsorbent materials , ?-Preconcentrator
Journal title :
Sensors and Actuators B: Chemical
Serial Year :
2008
Journal title :
Sensors and Actuators B: Chemical
Record number :
1436088
Link To Document :
بازگشت