Impact of sensor packaging on analytical performance and power consumption of metal oxide based gas sensor microarrays

The analytical performance and the power consumption of gas sensor microarrays belong to the most prominent properties governing the applicability. Packaging of sensor systems is often underestimated in its essential influence. Measurements and finite-element model calculations of the heat dissipation and gas fluidics have been performed to optimize the periphery of an SnO2 equipped gradient gas sensor microarray operated at 300 °C.