Hybrid gas sensor platform based on capacitive coupled field effect transistors: Ammonia and nitrogen dioxide detection

A versatile gas sensor platform based on capacitive coupled field effect transistors (CC-FET) was realised and successfully tested. The hybrid sensor structures contain gas sensitive thin organic and inorganic films incorporated in the suspended gates (SG) as sensing elements. The sensors show good functionality and gas sensitivity at room temperature. The dissipated power during operation does not exceed 1 MW.