Title of article
Hybrid gas sensor platform based on capacitive coupled field effect transistors: Ammonia and nitrogen dioxide detection
Author/Authors
Oprea، نويسنده , , Alexandru and Frerichs، نويسنده , , Heinz-Peter and Wilbertz، نويسنده , , Christoph and Lehmann، نويسنده , , Mirko and Weimar، نويسنده , , Udo، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
7
From page
161
To page
167
Abstract
A versatile gas sensor platform based on capacitive coupled field effect transistors (CC-FET) was realised and successfully tested. The hybrid sensor structures contain gas sensitive thin organic and inorganic films incorporated in the suspended gates (SG) as sensing elements. The sensors show good functionality and gas sensitivity at room temperature. The dissipated power during operation does not exceed 1 MW.
Keywords
Gas sensor , Gas hybrid FET , NO2 , NH3 detection
Journal title
Sensors and Actuators B: Chemical
Serial Year
2007
Journal title
Sensors and Actuators B: Chemical
Record number
1439165
Link To Document