Author/Authors :
Jinesh، نويسنده , , K.B. and Dam، نويسنده , , V.A.T. and Swerts، نويسنده , , J. and de Nooijer، نويسنده , , C. and van Elshocht، نويسنده , , S. and Brongersma، نويسنده , , S.H. and Crego-Calama، نويسنده , , M.، نويسنده ,
Abstract :
Room temperature detection of CO2 using metal–insulator–silicon (MIS) devices is reported. These devices comprise atomic layer deposited La2O3 thin films as the gas-sensitive dielectric layer and Pt, Pt/Ta and Al as the electrodes. Physical mechanisms that lead to the detection of CO2 at room temperature are discussed.
