In2O3 + xBaO (x = 0.5–5 at.%) – A novel material for trace level detection of NOx in the ambient

Indium oxide (In2O3) doped with 0.5–5 at.% of Ba was examined for their response towards trace levels of NOx in the ambient. Crystallographic phase studies, electrical conductivity and sensor studies for NOx with cross interference for hydrogen, petroleum gas (PG) and ammonia were carried out. Bulk compositions with x ≤ 1 at.% of Ba exhibited high response towards NOx with extremely low cross interference for hydrogen, PG and ammonia, offering high selectivity. Thin films of 0.5 at.% Ba doped In2O3 were deposited using pulsed laser deposition technique using an excimer laser (KrF) operating at a wavelength of (λ) 248 nm with a fluence of ∼3 J/cm2 and pulsed at 10 Hz. Thin film sensors exhibited better response towards 3 ppm NOx quite reliably and reproducibly and offer the potential to develop NOx sensors (Threshold limit value of NO2 and NO is 3 and 25 ppm, respectively).