Development of microstructure CO sensor based on hierarchically porous ZnO nanosheet thin films

A microstructure sensor based on hierarchically porous ZnO nanosheet (NS) thin films has been achieved by using a facile two-step solution phase method. The transparent ZnO seed-layer covered on both the conducting electrodes and the insulating SiO2 spacer regions acts as lattice-matched template, on which the assembly of ZnO NS thin films has been subsequently completed via a facile solvothermal process. The phase purity, morphology, and structure of the as-prepared NSs are investigated, and the results reveal that ZnO NSs, grown vertically on the substrate, exhibit hierarchically porous nanostructure with subunits of nanoparticles. The gas-sensing properties exhibit not only high response to CO with the response time of 25 s, but also low cross response to common interference gases at the operating temperature of 300 °C.