A PDMS–LTCC bonding using atmospheric pressure plasma for microsystem applications

A bonding method for transparent PDMS (polydimethylosiloxane) to rigid substrate fabricated using LTCC (low temperature co-fired ceramics) technology is presented in this paper. Bonding between both materials is achieved through activation of their surface with argon or oxygen/argon plasma of dielectric barrier discharge (DBD). The surface modification process is performed at atmospheric pressure. The influence of the type of working gas on the bonding process and composition of the PDMS and glass-covered LTCC test samples is investigated using X-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectroscopy–attenuated total reflection (FTIR–ATR), contact angles and surface roughness measurements. Moreover, an adhesion force between materials and leakproofness of the PDMS–LTCC bond is studied.