A multi-mode platform for cantilever arrays operated in liquid

A rapid and reliable multi-mode device capable of the readout of both the static and dynamic response of a micron scale cantilever array in a physiological liquid environment is presented. The resolution of the static mode is on the order of 1–2 nm and in the dynamic mode it is possible to measure up to the 19th flexural resonance mode of vibration of a 500 μm long and 1 μm thick cantilever. Rapid measurement from the tip of the cantilevers or line scan measurement of the cantilever profiles are both possible in dual mode. The device provides sequential readout of both modes to provide the best signal to noise ratio for each mode. Proof of principle measurements are presented demonstrating the capabilities of the device and confirming the readout from both the static bending and multiple dynamic resonance modes.