Title of article
Low temperature indium oxide gas sensors
Author/Authors
Suchea، نويسنده , , M. and Katsarakis، نويسنده , , N. and Christoulakis، نويسنده , , S. and Nikolopoulou، نويسنده , , S. and Kiriakidis، نويسنده , , G.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
7
From page
135
To page
141
Abstract
InOx thin films were grown by dc magnetron sputtering. Structural and morphological investigations carried out by XRD and AFM showed a strong correlation between crystallinity, surface topology and ozone sensitivity. The electrical conductivity exhibited a large change of six orders of magnitude during the processes of photoreduction/oxidation. It was concluded that it is mainly the grain size variation that determines the sensitivity of InOx films against ozone.
Keywords
ozone , InOx , Metal oxide thin films , Gas sensors
Journal title
Sensors and Actuators B: Chemical
Serial Year
2006
Journal title
Sensors and Actuators B: Chemical
Record number
1443220
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