Title of article
SU8 protective layers in liquid operating SAWs
Author/Authors
Arana، نويسنده , , N. and Puente، نويسنده , , D. and Ayerdi، نويسنده , , I. and Castaٌo، نويسنده , , E. and Berganzo، نويسنده , , J.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
6
From page
374
To page
379
Abstract
In some applications, the medium can be aggressive with sensing devices. In this work, an epoxy based resist is proposed as protective layer for a SAW-type viscosity sensor in liquid media, in order to provide the sensor with durability and stability. Love-type devices are developed on ST-quartz substrates. Ti/Ag bilayer and SiO2 are used as IDTs and waveguide materials respectively. SU8-50 is chosen as protective coating. Several configurations are developed. For 20, 30 and 40 μm wavelengths, transmission signal spectra are obtained and the influence of different device parameters is analyzed. Propagation wave damping is determined for the SAW devices when different viscosity samples are dropped on the sweet spot.
Keywords
SAW sensors , SU8 protective layers , Liquid viscosity
Journal title
Sensors and Actuators B: Chemical
Serial Year
2006
Journal title
Sensors and Actuators B: Chemical
Record number
1443257
Link To Document