EELS microanalysis of polycrystalline silicon thin films for solar cells grown at low temperatures

The aim of this work is the quantitative chemical analysis of polycrystalline silicon thin films grown on glass substrates at temperatures <600°C by means of transmission electron microscopy (TEM) and electron energy-loss spectrometry (EELS). Specimens produced with two different methods were investigated. We found significant differences in grain size and morphology, as well as in the distribution of oxygen. A surprisingly high amount of Ba diffusion from the subtrate was detected.