Optimization of layered laser crystallization for thin-film crystalline silicon solar cells

Layered laser crystallization during PECVD of a-Si:H is a new and advantageous method to deposit c-Si films onto glass with a rate of 10 Å s−1. This new technology consists of two laser-induced crystal growth steps: A seed layer is prepared from a-Si:H by an overlapped scanning of an Ar+ laser beam. Then the seed is repeatedly thickened by melting of newly deposited a-Si:H on top of the c-Si with KrF laser pulses. Various deposition parameters were matched together to process a layer with crystallites 100 μm in size. p+pn+- or n+np+-junctions were deposited in one chamber and in one run. VOC of 530 mV was achieved.