MOCVD-ZnO windows for 30 cm×30 cm CIGS-based modules

ZnO:B windows for 30 cm×30 cm-sized Cu(In,Ga)Se2 (CIGS)-based submodules are deposited by metal-organic chemical vapor deposition (MOCVD). The ZnO thin films have a high electron mobility of over 35 cm2/V s, and have a sheet resistance of about 10 Ω/sq. while keeping a transmittance of near 90% for the wavelength ranging from 400 to 1300 nm. Further improvement of the MOCVD deposition by growing ZnO/ZnO:B windows is performed, and a conversion efficiency of 12.93% (Voc/cell=592 mV, Jsc=33.87 mA/cm2, FF=0.645) for a 30 cm×30 cm-sized CIGS-based submodule with an aperture area of 864 cm2 has been achieved.