A combined three-dimensional finite element and scattering matrix method for the analysis of plane wave diffraction by bi-periodic, multilayered structures

A three-dimensional finite element method (FEM) for the analysis of plane wave diffraction by a bi-periodic slab is described and implemented. A scattering matrix formalism based on the FEM allows the efficient treatment of light reflection and transmission by multilayer bi-periodic structures, and the computation of Bloch modes of three-dimensional arrays. Numerical simulations, which show the accuracy and flexibility of the FEM, are presented.