The micro-nanoformability of Pt-based metallic glass and the nanoforming of three-dimensional structures

Pt48.75Pd9.75Cu19.5P22 amorphous alloy exhibits obvious glass transition behavior at a temperature of Tg=502 K, which is below the crystallization temperature Tx=588 K, and develops a supercooled liquid state in a wide temperature range of ΔTx (=Tx−Tg)=86 K. The present paper investigates the macroscopic and microscopic deformation behavior of the material and the possibility of micro-nano forming as a fabrication method and material for nano-devices. On a macroscopic scale, the material exhibits a Newtonian viscous flow in a supercooled liquid state. An index of the microformability is also evaluated by the geometrical transferability of a die shape to the material. For this study, we fabricated V-grooved micro dies of (100) Si by a silicon process. The V-groove dies are from 100 nm to 1 μm wide. The material exhibits superior formability on micrometer and nanometer scales and may possibly be applied to micro-nanomaterials for micro-nano devices.