• Title of article

    Spray formed aluminium alloys for sputtering targets

  • Author/Authors

    Yoshirawa، K. نويسنده , , Yoneda، Y. نويسنده , , Koide، K. نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2000
  • Pages
    -197
  • From page
    198
  • To page
    0
  • Abstract
    Because of their fine, uniform microstructure, sputtering targets produced from spray formed material give significant advantages in performance and have been found by customers to improve productivity and the quality of the thin films produced. Significant market growth is anticipated as demand takes off for high quality films in applications such as displays and optical disks.
  • Keywords
    decomposition , nutrient release , Gliricidia sepium , rainfall , fresh leaves , recalcitrant fractions , soluble fractions
  • Journal title
    POWDER METALLURGY
  • Serial Year
    2000
  • Journal title
    POWDER METALLURGY
  • Record number

    15423