Deposition of Zinc Oxide Thin Film on Calcite (CaCO3) Substrate via PLD at Room Temperature

Polycrystalline zinc oxide (ZnO) films were successfully deposited on calcite (CaCO3) by pulsed laser deposition PLD at room temperature. Zinc metal target (4N purity, analytical grade) was used for laser ablation in ambient O2 atmosphere. XRD results show the polycrystallinity of ZnO thin film. Four probe apparatus was used to measure the resistivity of thin film. It was found to have very high resistivity ~ 200 MΩ m. High resistivity is attributed to the high-quality crystal structure of ZnO. ZnO2 was also found to be present in the thin film. These films have great importance in fabrication of gas sensors and other applications.