Uncertainty quantification of MEMS using a data-dependent adaptive stochastic collocation method

This paper presents a unified framework for uncertainty quantification (UQ) in microelectromechanical systems (MEMS). The goal is to model uncertainties in the input parameters of micromechanical devices and to quantify their effect on the final performance of the device. We consider different electromechanical actuators that operate using a combination of electrostatic and electrothermal modes of actuation, for which high-fidelity numerical models have been developed. We use a data-driven framework to generate stochastic models based on experimentally observed uncertainties in geometric and material parameters. Since we are primarily interested in quantifying the statistics of the output parameters of interest, we develop an adaptive refinement strategy to efficiently propagate the uncertainty through the device model, in order to obtain quantities like the mean and the variance of the stochastic solution with minimal computational effort. We demonstrate the efficacy of this framework by performing UQ in some examples of electrostatic and electrothermomechanical microactuators. We also validate the method by comparing our results with experimentally determined uncertainties in an electrostatic microswitch. We show how our framework results in the accurate computation of uncertainties in micromechanical systems with lower computational effort.