Fabrication of high performance thin films from metal fluorocomplex aqueous solution by the liquid phase deposition

The hetro-structured oxide thin films from metal fluorocomplex solution have been prepared by the liquid phase deposition (LPD) method. The Pt/Nb2O5 and Au/Nb2O5 composite films can be prepared from a mixed solution of niobium source, H3BO3, Pt(NH3)4Cl2 and HAuCl4 aqueous solutions under the ambient temperature and atmosphere. In the case of Au/SiO2 composite film, (NH4)2SiF6 solution is used as a mother solution. The Pt and Au ionic species are deposited in Nb2O5 and SiO2 matrices. They are reduced to their metallic state after treatment above 200 °C. The size of dispersed particles can be controlled by heat treatment temperature. It is also clear that, gold nanoparticles are also found to interact with SiO2, although the interaction is smaller than that with Nb2O5 showing the size of Au nanoparticles remain smaller in Nb2O5 that in SiO2.