Title of article :
The use of fluoropolymers to protect semiconductor materials
Author/Authors :
Extrand، نويسنده , , C.W.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Pages :
4
From page :
121
To page :
124
Abstract :
Fluoropolymers are the materials of choice for many materials integrity management applications within the microelectronics industry. This brief overview discusses common types of fluoropolymers and the stringent requirements of semiconductor-processing environments. Fluoropolymers are used in a wide variety of such fluid and device handling applications because they provide a unique combination of toughness, purity, and chemical resistance.
Keywords :
Fluoropolymers , Microelectronics processing , fabrication
Journal title :
Journal of Fluorine Chemistry
Serial Year :
2003
Journal title :
Journal of Fluorine Chemistry
Record number :
1607621
Link To Document :
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