Title of article
The use of fluoropolymers to protect semiconductor materials
Author/Authors
Extrand، نويسنده , , C.W.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
4
From page
121
To page
124
Abstract
Fluoropolymers are the materials of choice for many materials integrity management applications within the microelectronics industry. This brief overview discusses common types of fluoropolymers and the stringent requirements of semiconductor-processing environments. Fluoropolymers are used in a wide variety of such fluid and device handling applications because they provide a unique combination of toughness, purity, and chemical resistance.
Keywords
Fluoropolymers , Microelectronics processing , fabrication
Journal title
Journal of Fluorine Chemistry
Serial Year
2003
Journal title
Journal of Fluorine Chemistry
Record number
1607621
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