Title of article :
Bis(diaryliodonium) perfluorosulfonimide zwitterions as potential photo acid generators
Author/Authors :
Mei، نويسنده , , Hua and DesMarteau، نويسنده , , Darryl D.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2014
Pages :
4
From page :
12
To page :
15
Abstract :
Three examples of bis(diaryliodonium) perfluorosulfonimide (BDI-PFSI) zwitterions have been prepared as a potential new class of ionic photo-acid generators for chemically amplified photoresist formulations.
Keywords :
Iodonium , Photo-acid generators , Acid diffusion , Zwitterions
Journal title :
Journal of Fluorine Chemistry
Serial Year :
2014
Journal title :
Journal of Fluorine Chemistry
Record number :
1612214
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=1612214
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