Title of article
Dynamic analysis of bifurcating, non-linear thin film micro-structures
Author/Authors
Carey، نويسنده , , M.W. and Chase، نويسنده , , J.Geoffrey and Carr، نويسنده , , A.J. and Kowarz، نويسنده , , M.W.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
11
From page
1821
To page
1831
Abstract
As micro-device application in consumer and commercial products develops, efficient tools are required to simulate device dynamics and assess structural performance. An integrated methodology is developed for studying the dynamics of thin film bifurcating structures. Results are presented for a generic thin film structure, which exhibit classical electro-mechanical hysteresis. Such structures can be used to produce light modulating micro-electro-mechanical system (MEMS) devices.
Keywords
Dynamic , Residual stress , Large deflection , Geometric stiffness , Hybrid stress , Newmark constant average acceleration , Bifurcation , Electrostatic , Finite element
Journal title
Engineering Structures
Serial Year
2004
Journal title
Engineering Structures
Record number
1639915
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