• Title of article

    Dynamic analysis of bifurcating, non-linear thin film micro-structures

  • Author/Authors

    Carey، نويسنده , , M.W. and Chase، نويسنده , , J.Geoffrey and Carr، نويسنده , , A.J. and Kowarz، نويسنده , , M.W.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2004
  • Pages
    11
  • From page
    1821
  • To page
    1831
  • Abstract
    As micro-device application in consumer and commercial products develops, efficient tools are required to simulate device dynamics and assess structural performance. An integrated methodology is developed for studying the dynamics of thin film bifurcating structures. Results are presented for a generic thin film structure, which exhibit classical electro-mechanical hysteresis. Such structures can be used to produce light modulating micro-electro-mechanical system (MEMS) devices.
  • Keywords
    Dynamic , Residual stress , Large deflection , Geometric stiffness , Hybrid stress , Newmark constant average acceleration , Bifurcation , Electrostatic , Finite element
  • Journal title
    Engineering Structures
  • Serial Year
    2004
  • Journal title
    Engineering Structures
  • Record number

    1639915